鶹ýӳ

Factory Automation Solutions

鶹ýӳ offers the industry’s cleanest wafer sorter and load ports. The Spartan Sorter delivers industry-leading particle performance along with productivity and serviceability; our 300mm Vision load ports are ultra-clean with reliable and flexible tool interfaces; and our 200mm SMIF load port transfers (LPT) products are the industry’s standard for adaptive SMIF solutions. Additionally, 鶹ýӳ offers an innovative near-tool buffer solution to reduce AMHS bottlenecks and increase tool utilization.

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